A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches.

Abstract

MEMS stiffness-tunable devices, owing to their low resonant frequency and high sensitivity, have been widely adopted in fields such as biological force sensing, vibration sensing, and inertial sensing. However, traditional stress-effect-based stiffness-adjustment methods offer limited tuning range. This paper introduces a novel stiffness-tuning mechanism based on the principle of stiffness compensation, integrating positive stiffness springs with V-shaped negative stiffness springs in a parallel configuration. A self-locking mechanism enables precise control of the mechanical preloading on the negative stiffness structures to realize stiffness adjustment. This design is prototyped by microscale fabrication techniques and is suitable for miniaturization. The experimental results confirm a stiffness reduction of over 90% and demonstrate bistability. These findings highlight the potential of the design for high-sensitivity MEMS accelerometers and dual-mode optical switches with low switching voltage.