A Redundant-Sensing-Based Six-Axis Force/Torque Sensor Enabling Compactness and High Sensitivity.

Abstract

Capacitive sensors are widely adopted in compact robotic systems due to their simple structure, ease of fabrication, and scalability for miniaturized designs. However, sensor miniaturization inevitably leads to reduced sensitivity and increased sensitivity imbalance, particularly in torque measurements, due to limited electrode area and spatial constraints. To address these limitations, this paper presents a compact six-axis force/torque (F/T) sensor based on a redundant capacitive sensing architecture. The proposed sensing architecture employs a symmetric arrangement of multiple capacitive electrodes, providing redundant capacitance measurements that enhance sensitivity while reducing coupling errors under multi-axis loading conditions. By exploiting redundant capacitive responses rather than relying on complex mechanical separation, the proposed design effectively improves measurement robustness. Based on this architecture, a compact six-axis F/T sensor with a diameter of 20 mm and a height of 12 mm is developed. Experimental validation demonstrates that the proposed sensor achieves linearity (>98.2%) with reduced cross-axis interference, confirming improved sensitivity and reliable multi-axis F/T measurement. This work provides a practical and scalable solution for integrating high-performance six-axis F/T sensing into space-constrained robotic systems.