Cellular shape micromachined actuator ribbons.

Abstract

This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of microscale actuator cells allows the addition of force and displacements of a large number of cells (up to 7600 in one demonstrated array), leading to displacements ranging in the hundreds of microns and several gram forces of axial force. For 50 µm thick actuators with horizontal dimensions in the 1-4 millimeter range, an out-of-plane displacement of up to 678 µm at 46 V, a bending moment of up to 2.0 µNm, i.e., 0.08 N (~8 gram-force) of axial force over a 50 µm by 2 mm cross-sectional area of the actuator (800 kPa of electrostatically generated stress), and an energy density (mechanical work output per stroke per volume) up to 1.42 mJ/cm³ was demonstrated for the actuators.