Four-Stub Resonator-Coupled MIM Waveguide Sensor.

Abstract

In this design, we propose a completely new sensor structure. It features a metal-insulator-metal (MIM) waveguide and a circular four-stub resonator (CFSR). Using the finite element method, we analyzed the performance of the sensor structure. We examined the impact of different parameters and structural variations on its performance. Ultimately, we determined the optimal performance parameters for the best configuration. The modified device demonstrated a sensitivity (S) of 2940 nm/RIU and a figure of merit (FOM) of 52.5. Furthermore, this sensor design demonstrates significant potential for temperature measurement applications, with a core parameter of 1.508 nm/°C.